Vapor Phase Techniques for Semiconductor Manufacturing

Comprehensive understanding of physical vapor deposition (PVD) and chemical vapor deposition (CVD) techniques and their crucial roles in semiconductor manufacturing; understanding of the principles, processes, and applications of PVD and CVD, with a specific focus on mass transport, heat transport, chemistry for CVD, epitaxy, vapor phase exchange, and CVD reactor design…

Credits

3 credits

Course Code

SENG 442